Modelling of Microfabrication Systems

From the reviews:

"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)