Plasma Deposition of Amorphous Silicon-Based Materials
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Sprache:Englisch
Fr. 122.90
inkl. gesetzl. MwSt.Beschreibung
Produktdetails
Format
Kopierschutz
Nein
Family Sharing
Nein
Text-to-Speech
Nein
Erscheinungsdatum
10.10.1995
Herausgeber
Pio Capezzuto + weitereVerlag
Elsevier Science & Techn.Seitenzahl
324 (Printausgabe)
Sprache
Englisch
EAN
9780080539102
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.
- Focuses on the plasma chemistry of amorphous silicon-based materials
- Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced
- Features an international group of contributors
- Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
- Focuses on the plasma chemistry of amorphous silicon-based materials
- Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced
- Features an international group of contributors
- Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
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