Micro and Nano Fabrication Tools and Processes

“The book is clearly written and easy to read. The
various topics are balanced and well organized. … The numerous figures and
schematics are the most useful tools of the book. … It is useful to students
and newcomers, but also experts may find it a good reference because there are
some useful aspects not easily found in other books … . the book offers a good
opportunity to go through the basic semiconductor fabrication technologies.” (Rosaria
A. Puglisi, MRS
Bulletin, Vol. 40, October, 2015)

“Provide an excellent summary and explanation for nearly every micro and nano fabrication subject that readers could possibly be interested in learning about. … this work is useful as an instructional aid with comprehension questions at the end of each chapter, as well as a chapter that contains a start-to-finish example of device fabrication. … Summing Up: Recommended. Lower- and upper-division undergraduates, graduate students, and two-year technical program students.” (N. M. Fahrenkopf,Choice, Vol. 52 (12), August, 2015)