CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms
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- Hardcover
- Taschenbuch ausgewählt
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Sprache:Englisch
Fr. 191.00
inkl. gesetzl. MwSt.,
Beschreibung
Produktdetails
Einband
Taschenbuch
Erscheinungsdatum
22.10.2010
Abbildungen
XII, 232 p. 84 illus.
Verlag
Springer BerlinSeitenzahl
232
Maße (L/B/H)
23.5/15.5/1.4 cm
Gewicht
376 g
Auflage
Softcover reprint of hardcover 1st ed. 2005
Sprache
Englisch
ISBN
978-3-642-06152-3
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
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