Chemical Vapor Deposition Polymerization The Growth and Properties of Parylene Thin Films
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Sprache:Englisch
Fr. 137.00
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Beschreibung
Produktdetails
Einband
Taschenbuch
Erscheinungsdatum
03.12.2010
Abbildungen
XVII, 102 p.
Verlag
Springer UsSeitenzahl
102
Maße (L/B/H)
23.5/15.5/0.8 cm
Gewicht
201 g
Auflage
Softcover reprint of hardcover 1st edition 2004
Sprache
Englisch
ISBN
978-1-4419-5413-8
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films
is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
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